Nguồn RF Plasma

Apex

High-Power Density for Compact Installation

Unparalleled Breadth of RF-Application Delivery without Custom Lead Times

Asymmetric Bias Waveform Generator for Direct Control of Substrate Voltage and Ion Energy

A Compact, Economical, Easy to Install, Low Power RF Platform

Economical, Mid-Frequency Generator Tailored for Plasma Processing

Industry-Leading, Repeatable Power Delivery for Core Plasma Applications

Compact, Cost-Effective Integrated Generator and Solid-State Matching RF Power Delivery System

Multi-Level Pulsing and Pulse Waveform Control for Emerging Plasma Applications

Multi-Level Pulsing and Pulse Waveform Control for Emerging Plasma Applications